在900℃,循环氧化20 h的试验条件下研究了偏压对CrAlN薄膜抗氧化性的影响.用X射线衍射仪测定薄膜氧化前后的相结构,用场发射扫描电镜观察薄膜氧化前后的表面形貌,并每隔4h测量其氧化增重.结果表明.随着偏压的增加,CrAlN薄膜中的铝含量增加,薄膜的抗氧化性增强.其主要原因是:1)随着铝含量的增加,薄膜表面形成了更多的铬铝混合氧化物,它们充当了氧的扩散阻挡层,减小了高温条件下氧向薄膜内的扩散能力;2)加入的铝与氮以共价键结合,提高了薄膜的热稳定性.
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