采用离子束混合技术在不锈钢衬底上制备50%TiC-C薄膜,用剂量1×1018ions/cm2、能量5keV的氢离子对薄膜进行辐照.通过X射线光电子能谱对氢离子辐照前后的50%TiC-C薄膜进行组成元素化学结合能谱的分析,着重研究污染氧对薄膜氢离子辐照前后的影响.研究发现氢离子辐照会引入更多的污染氧进入膜内,但污染氧不影响薄膜的阻氢性能.
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