信息技术的发展要求存储器件必须具备超高存储密度、超快的存取速率.存储介质是高密度信息存储研究中的基本问题,目前几乎所有的超高密度存储技术都是在薄膜介质上实现的.薄膜的性质除依赖于存储介质材料外还依赖于薄膜的制备技术.从存储介质薄膜的制备角度介绍了超高密度信息存储的研究进展.
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