为了解决SiC硬质膜力学性能难测试的问题,提出以Oliver-Pharr模型为基础的位移敏感压痕技术来评价SiC硬质膜的硬度及弹性模量.为了解其可靠性,将此方法用于普通玻璃和不锈钢作为参考.选用厚度为315±15 μm的化学气相沉积(CVD)SiC硬质膜作为样品,实验以0.5 N/s的载荷速度进行加卸载,载荷峰值取10～30 N,结果表明:位移敏感压痕法计算出的普通玻璃和不锈钢的硬度分别为6.5 GPa和1.7 GPa,传统显微硬度计测试出的结果分别为5.3 GPa和1.8 GPa,其值比较接近;此方法计算出普通玻璃和不锈钢的弹性模量分别为65.1 GPa和178.4 GPa,与实际值70 GPa和190 GPa误差很小,因此表明该方法可靠性良好.利用位移敏感压痕技术得知CVD SiC硬质膜的硬度和弹性模量为37.7 GPa和456.4 GPa.另外根据维氏压痕形貌,应用JISR1607-1990标准,Anstis,Evans&Charles三断裂韧性公式,计算出普通玻璃和CVD SiC硬质膜KIC均值分别为0.78 MPa·m1/2和2.70 MPa·m1/2.此方法可广泛用于评价硬质膜的硬度和弹性模量等力学性能.
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