用ＸＰＳ，ＡＥＳ和ＸＲＤ分析厚约２μｍ离子束辅助沉积ＴｉＮ膜的成分和结构．实验表明：膜的表面成分主要是ＴｉＯ_２，膜内是轻微择优取向晶粒较细的ＴｉＮ．膜与衬底的界面存在混合区，用阶梯加载法测定润滑条件下ＧＣｒ１５钢与ＴｉＮ膜对磨时的临界载荷－速度关系．试验发现ＴｉＮ膜可显著扩大边界润滑区，承受较大载荷而不致发生擦伤．
XPS, AES and XRD show that the main composition of TiN film prepared by ion beam assisted deposition is TiN with fine grain size and slightly preferential orientation,except predominent TiO_2 on surface of film and a wide mixed region of Ti, Fe, N at interface between film and substrate. The tribological behaviour of the TiN film was tested on a ball/disc frictional device under stepwise loading and lubricating sliding. From P-v diagram, the enlargement of boundary lubrication region has been found. It seems that the existence of TiN film increases the load carrying capacity of substrate of Cr12MoV steel.
参考文献
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| [5] | KantRA,SartwellBD．MaterSciEng,1987 |
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