通过阳极极化和电化学阻抗谱测试,研究了铜在磷酸溶液中进行电化学抛光的电化学行为.研究发现:随着磷酸浓度的增加,铜在0.2,0.4,0.6,0.8V四个电位下电化学抛光后的粗糙度都呈现先减小、后增大的趋势,在磷酸质量分数为55％时达最低值；EIS图谱拟合的Rs值的变化反映了磷酸盐粘膜层电阻和铜表面氧化膜电阻的变化,此外,随着磷酸浓度的增加,EIS中第一个容抗半圆的弛豫时间延长,铜的溶解反应速度加快.
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