概述了应用于硬盘磁头表面的类金刚石薄膜(DLC)保护膜的性能要求、微观结构模型、生长机理及制备方法,总结了影响薄膜性能的因素和薄膜的表征方法,分析了当前影响类金刚石薄膜在磁头行业中应用的因素及可能的解决办法,并展望了应用于磁头表面等半导体行业的高性能DLC薄膜的制备前景.
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