用中温化学气相沉积工艺制备TiC0.81N0.48和TiC0.61N0.44O0.15涂层,用显微维氏硬度计测定TiCN和TiCNO涂层的硬度,用X射线衍射仪和激光拉曼光谱仪分析涂层的结构,研究了TiCN和TiCNO涂层在700℃真空退火后的组织结构转变对硬度的影响.结果表明:真空退火后TiC0.81N0.48和TiC0.61N0.44O0.15涂层的硬度先下降,然后趋于稳定.TiC0.81N0.48和TiC0.61N0.44O0.15涂层在700℃真空退火时,C原子从TiCN晶格析出后先形成sp3C;随着退火时间的延长,sp3C逐渐向sp2C转变；随后sp2C团簇增加,无序程度降低,TiCN逐渐分解为TiC和TiN相.硬度的降低,是由于涂层内缺陷密度的减少使应力释放,还与高温下TiC0.81N0.48和TiC0.61N0.44O0.15涂层组织结构的转变,特别是sp3C和sp2C的形成有关.与TiC0.61N0.44O0.15涂层相比,在700℃真空退火时TiC0.81N0.48涂层组织转变的进程加快,热稳定性能较差.
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