退火温度对Li∶ZnO薄膜紫外发射性能影响

人工晶体学报, 2014, 43(9): 2329-2334.

退火温度对Li∶ZnO薄膜紫外发射性能影响

贾相华 ^1, , 尹龙承 ^2, , 姜宏伟 ^3, , 朱瑞华 ^4, , 王丹 ^5, , 郑友进 ^6,

1.牡丹江师范学院超硬材料重点实验室,牡丹江157012

2.牡丹江师范学院超硬材料重点实验室,牡丹江157012

3.牡丹江师范学院超硬材料重点实验室,牡丹江157012

4.牡丹江师范学院超硬材料重点实验室,牡丹江157012

5.牡丹江师范学院超硬材料重点实验室,牡丹江157012

6.牡丹江师范学院超硬材料重点实验室,牡丹江157012

基金项目: 牡丹江师范学院科学技术研究计划(QC200904) 牡丹江市科技攻关计划(G2013e1233) 黑龙江省自然科学基金(E201341)

关键词： Li∶ZnO , 光致发光 , 溶胶-凝胶 , H施主

Influence of Annealing Temperature on Ultraviolet Emission Properties of Li∶ZnO Thin Films

Keywords： Li∶ZnO , photoluminescence , sol-gel , H donor

利用溶胶-凝胶法在Si衬底上制备不同退火温度的Li∶ZnO薄膜.借助X射线衍射(XRD)、X射线光电子谱(XPS)、扫描电镜(SEM)和光致发光(PL)谱研究样品结晶质量、成分、表面形貌和发光特性.结果表明:所有样品均高度c轴择优取向生长;随退火温度升高,样品结晶性变好,紫外发射增强.LiOH在退火温度超过700℃分解,使Li、H进入到ZnO晶格,在ZnO薄膜中形成LiZn-H复合缺陷,这种复合缺陷使H被困在ZnO薄膜中,形成H施主,显著提高ZnO薄膜紫外发光强度,抑制ZnO薄膜绿光发射.

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