开发了一种导电薄膜热膨胀系数的实时测试系统,即显微成像与数字图像相关方法相结合的测试系统.利用该系统在线实时测定了SnO_2导电薄膜的热胀系数随温度变化的关系曲线,并进一步可得到膜与基体间应力的变化规律.结果表明:该系统能较准确地测出SnO_2薄膜与陶瓷基体各向异性的热膨胀系数;根据试验结果及现有理论可以计算出基体与膜之间的最大应力以及基体内部的应力随温度的变化情况.
An on-line real-time system for measuring thermal expansion coefficients of conductive thin films was developed, which was combined with the micro-imaging and digital image correlation method. The relation curves of thermal expansion coefficients of SnO_2 thin films with the temperature were determined and the stress changes between the film and substrate could also be obtained further by the system. The results show that the system accurately determined the anisotropy of thermal expansion of the SnO_2 thin film and ceramic substrate.According to the experimental results and existing theories, the maximum stress between the films and substrate and the changes of the stress inside the substrate could be calculated.
参考文献
| [1] | Davazoglou D. .OPTICAL PROPERTIES OF SNO2 THIN FILMS GROWN BY ATMOSPHERIC PRESSURE CHEMICAL VAPOUR DEPOSITION OXIDIZING SNCL4[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1997(1/2):204-213. |
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