在普通玻璃衬底上利用掺杂2%(质量)Al2O3的ZnO陶瓷靶材在中频磁控溅射设备中制备了掺铝氧化锌(ZnO∶Al,AZO)薄膜.利用XRD、XPS、紫外可见分光光度计和Hall测试系统研究了Ar气压力(0.73～2.0 Pa)对AZO透明导电薄膜结构、光学和电学性能的影响.随着Ar气压力的增大,电阻率呈先减小后增大的趋势,在0.83 Pa时,AZO薄膜的电阻率为6.91×10-4 Ω·cm,在波长400～800 nm间的平均透过率超过86%.研究结果表明,Ar气压力对于AZO薄膜的导电性是一个敏感的参数,Ar气压力影响在薄膜沉积过程中氧空位的形成和分布,从而影响薄膜的导电性.
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