探讨了U薄膜的制备方法.主要介绍了机械抛光、电解抛光、机械轧制、磁控溅射沉积、离子束辅助沉积和聚焦离子束方法等,涉及了精细U薄膜的制备要求.同时,简要介绍了防止U薄膜氧化的后处理手段.
A brief overview of U film preparation methods is given. The methods primarily include mechanical polishing,electrolytic polishing, mechanical rolling, magnetron sputtering deposition, ion beam assisted deposition, and focused ion beam, their processes aiming at the preparation of fine U films are discussed. The post-treatment of U film against oxidation is also introduced briefly.
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