由已有热力学和相图实验数据,用Calphad技术优化出一组描述Ga-In-As三元体系热力学性质的数学模型,定量估算了在用外延法制作III-V族化合物时,由于外延层和衬底晶格不匹配,外延分子晶格弹性形变的形变能对固液平衡相图的影响,计算相图和实验结果基本一致.
The parameters of the thermodynamic model for the ternary system Ga-In-As are optimized from the available experimental data,and the influence of the elastic energy on the phase diagram,induced by the dismatch of the growing lattice with the substrate,is quantified.Correspondent:SHEN Jianyun,Laboratory No.301,(General Reserach Intitute for Non-Ferrous Metals,Beijins 100088)
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