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采用射频磁控溅射在玻璃衬底上制备了BiFeO3薄膜,通过透射光谱和椭圆光谱研究了氧分压对BiFeO3薄膜能带结构及光学性能的影响.结果表明,BiFeO3薄膜在近红外区具有良好的透射性,透射率均在80%以上,其禁带宽度Eg=(2.79±0.03)eV.随着氧分压的增大,BiFeO3薄膜中氧缺陷及氧缺陷能级减少,导致透射率和禁带宽度均增大.同时发现,OJL色散模型与Cauchy色散模型的叠合能够对BiFeO3薄膜的椭圆光谱进行很好的描述.

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