设计并制作了一种适用于3ω技术的独立探头.提出了利用基于这种独立探头的3ω技术进行固体热导率测量的原理和方法.与传统3ω技术相比,基于独立探头的3ω技术具有探测器使用寿命长、不再对样品表面有光滑要求的优势,并且实现了对样品热导率的无损测量.对几种标准样品的热导率进行测试的结果表明,基于独立探头的3ω技术在表征块状固体及几百微米厚晶片的热导率方面有很高的准确性,且在传统3ω技术不适用的材料(如具有多孔结构的样品)的热导率表征方面具有潜在的应用价值.
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