本文建立了硅烷和氢气体系中气体动量、热量和质量同时传递,并且耦合硅烷热分解反应的多晶硅气相沉积模型,选择适宜的物理模型和边界条件通过流体力学软件Fluent 6.3.26进行数值模拟.之后模拟了进气组成、反应温度、反应压力及进口速度等因素对沉积特性的影响,得到结论:当进气组成、反应温度和反应压力增大时,硅的沉积速率增大、单位能耗降低；当进气速度增大时,硅的沉积速率和单位能耗均呈增大趋势；在进口区域硅沉积速率随着硅棒延伸增大,在离进口较远的区域,硅沉积速率随着硅棒延伸而减小.
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