目的：研究Si的掺入对VAlN硬质涂层机械性能的影响行为。方法利用双靶( V50 Al50靶与Si靶)磁控溅射沉积技术,保持V50 Al50靶的功率为一定值,通过控制Si靶的功率,获得Si含量不同的VAlSiN硬质涂层,分析涂层的成分、相组成、硬度及耐磨损性能。结果 Si在涂层中以Si3 N4非晶相存在,Si3 N4起到细化晶粒的作用,少量Si的掺入可使涂层的硬度与耐磨性能得到提升。但当Si大量掺入后,Si3 N4非晶相成为涂层中的主相,导致涂层的硬度与耐磨性能出现下降。结论少量Si的掺入有益于VAlN涂层机械性能的提升。
Objective To study the effect of silicon addition on mechanical properties of the VAlN hard coatings. Methods U-sing the two-target (V50Al50 target and Si target) magnetron co-sputtering machine to deposit the VAlSiN hard coatings. The sili-con content was adjusted by the power applied to the silicon target. Results The silicon added in the coatings was all in the Si3 N4 phase, which had a grain refining effect. When the silicon content was low, the mechanical properties ( both hardness and wear rate) of the coatings were improved. However, once the silicon content was higher than that, Si3 N4 became the main phase of the coatings, and the mechanical properties of the coatings turned worse. Conclusion Adding a little silicon to the VAlN hard coatings could improve their mechanical properties.
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