为了克服MoS2薄膜在大气环境下极易氧化失效且耐磨性能差的缺点,采用非平衡直流磁控溅射技术制备了MoS2/Ti复合膜,研究了Ti靶电流对复合膜结构和性能的影响.电子探针(EPMA)测定表明,膜中Ti的含量随着Ti靶电流的增加而增加.场发射扫描电子显微镜(FE-SEM)对膜的表面和截面形貌观察发现,膜的表面由尺寸为几十～几百纳米的颗粒组成,而膜的截面呈柱状晶结构.膜的致密性和Ti靶电流有关,电流越高,膜的致密性越好,从而膜的硬度也越高.
参考文献
| [1] | Renevier N M et al.[J].Surface and Coatings Technology,2000,127:24. |
| [2] | Renevier NM.;Oosterling H.;Konig U.;Dautzenberg H.;Kim BJ.;Geppert L. Koopmans FGM.;Leopold J. .Performance and limitations of MoS2/Ti composite coated inserts[J].Surface & Coatings Technology,2003(1):13-23. |
| [3] | Sun K K et al.[J].Surface and Coatings Technology,2003,428:169-170. |
| [4] | Carrera S.;Salas O.;Moore JJ.;Woolverton A.;Sutter E. .Performance of CrN/MOS2 (Ti) coatings for high wear low friction applications[J].Surface & Coatings Technology,2003(1):25-32. |
| [5] | Renevier N M et al.[J].Surface and Coatings Technology,2003,659:163-164. |
| [6] | Fox V et al.[J].Surface and Coatings Technology,2000,125:347. |
| [7] | 田野,何俣,尚静,朱永法.水热法合成MOS2层状材料及其结构表征[J].化学学报,2004(18):1807-1810. |
| [8] | 谢凤宽,梁志杰,陈宗浩.摩擦电喷镀Ni-Co-MoS2复合镀层摩擦学性能研究[J].装甲兵工程学院学报,2002(02):60-63. |
| [9] | Jaffee H W et al.[J].Wear,2000,237:283. |
| [10] | Wang D Y et al.[J].Surface and Coatings Technology,1999,629:120-121. |
| [11] | Arnell R D et al.[J].Surface and Coatings Technology,1999,112:170. |
| [12] | Teer DG. .New solid lubricant coatings[J].Wear: an International Journal on the Science and Technology of Friction, Lubrication and Wear,2001(2):1068-1074. |
| [13] | Spalvins T .[J].Thin Solid Films,1982,96:17. |
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