强流脉冲离子束在离子能量密度达到5J/cm2的条件下,辐照靶材表面形成二次烧蚀等离子体,可以在基材表面沉积与靶材化学成分一致性良好的膜层.评述了近年强流脉冲离子束沉积功能膜的研究进展,为进一步进行膜层沉积机理和工艺研究提供理论依据.
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