对玻璃基双层镍表面进行阳极活化以提高镍层之间的结合强度.阳极活化液组成和工艺条件为:NiCl2·6H2O 100 g/L,H3BO325g/L,pH 4.0,温度45℃,阳极电流密度10～30 mA/cm2,时间5～15 min.研究了电流密度和处理时间对镍镀层表面形貌、孤岛结合力、表面粗糙度和界面结合强度的影响,探讨了双层镍表面粗糙度和界面结合强度的关系.结果表明,在30 mA/cm2下阳极活化10 min后,双层镍的界面结合强度为629.8MPa,比盐酸活化试样高了近2倍.镍层表面粗糙度与界面结合强度之间有明显的对应关系,表面粗糙度越大,界面结合强度越高.采用阳极活化法可有效提高微机电系统微器件的可靠性.
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