为了研究TiO2氧空位形成的影响因素,用管式电阻炉在空气、Ar及不同温度下对TiO2烧结.采用扫描电子显微镜（SEM）、X射线衍射（XRD）和X射线光电子能谱（XPS）对烧结TiO2样品的微观形貌、物相组成、元素及价态进行了表征,研究了烧结温度、烧结气氛和Ar＋刻蚀对TiO2样品氧空位形成的影响.结果表明：相同气氛下,随着烧结温度的升高,TiO2氧空位浓度逐渐增大;相同温度下,惰性气氛有利于TiO2氧空位的产生;Ar＋刻蚀有利于TiO2氧空位的形成.
To study the effect on the formation of oxygen vacancy of TiO2,the experiments of TiO2 sintered at air or argon atmosphere in tubular resistance furnace at different temperature were carried out.The microcosmic morphology,phase,elemental composition and valence states of sintered TiO2 were determined by scanning electron microscope（SEM）,X-ray diffraction（XRD） and X-ray photoelectron spectrometer（XPS）.The effect of sintering temperature,sintering atmosphere and argon ion etching on the formation of oxygen vacancies of sintered TiO2were researched.The results show that with the increasing of the sintering temperature,the concentration of oxygen vacancies is increased under the same atmosphere;the inert atmosphere（argon atmosphere） is favorable to the generation of oxygen vacancies of TiO2 under the same temperature,and the argon ion etching is contributed to the formation of oxygen vacancies of TiO2.
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