在多晶金属基片上制备双轴织构YSZ膜

中国稀土学报, 1998, 16(3): 277-279.

1.北京有色金属研究总院,北京,100088

2.北京有色金属研究总院,北京,100088

3.北京有色金属研究总院,北京,100088

4.电子部四十六研究所,天津300220

5.哈尔滨工业大学,哈尔滨,150001

基金项目: 中国科学院资助项目(59671052) 国家超导委员会资助项目

Deposition of Biaxially Aligned YSZ layers on Polycrystalline Metallic Substrate

采用调制偏压射频磁控溅射技术在多晶Hastelloy-C金属基带上制备钇稳定的ZrO2薄膜(YSZ), 得到了c-轴织构和部分平面内双轴织构的YSZ薄膜. 用X射线衍射θ-2θ扫描、ω扫描和φ扫描对YSZ薄膜的织构进行了测量, 并研究了沉积条件对织构形成的影响.

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