The sensitivity and selectivity of gas sensors are related with not only sensing material, but also their operating temperatures. Applying this property, temperature modulation technique has been proposed to improve the selectivity of gas sensors. With a newly developed alumina based micro gas sensor, the sensitivity to CO and CH4 at different operating temperatures was investigated. By modulating the temperature of the sensor at pulse and sine wave modes with different frequencies and amplitudes, the dynamic responses of the sensor were measured and processed. Results show that the modulating waveshape plays an important role in the improvement of selectivity, while the influence of frequency is small at the suitable sampling frequency in the range of 25 mHz～200 mHz.
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