利用电沉积方法制备Ni-P非晶薄膜。借助原位X射线分析技术，分析连续加热过程中薄膜晶化与相变行为等。通过X射线定量分析，确定出不同温度下各相的析出量，由此计算各相的晶化与相变激活能以及晶化结晶度等。结果表明，Ni-P非晶薄膜的晶化与相变行为等，均与薄膜中P含量有关。在晶化过程中，发现了四种亚稳相即NiP、Ni2P、Ni12P5及Ni5P2。计算得到：NiP、Ni2P及Ni3P的相变激活能分别为 、 及 ；单个析出相的相变激活能低于Ni-P合金晶化激活能和Ni原子的自扩散激活能。
Crystallization process in Ni-P amorphous alloy during continuous heating was investigated using in situ X-ray diffraction (XRD) analysis. The results show that different phosphorous content brings the difference of crystallization temperature and metastable phases transformed during continuous heating. Four metastable phases NiP、Ni2P、Ni12P5、Ni5P2 were detected in crystallization process. The activation energy of phase transformation and the crystallinity were calculated using dates of XRD gained from crystallization process. Activation energies of NiP(133±15kJ/mol), Ni2P(172±19kJ/mol) and Ni3P(190±20kJ/mol) were less than the crystallization activation energy of Ni-P amorphous alloy and the self-diffusion activation energy of nickel. This evidence supported that the formation of transformation phases was dominated not only atom-jumping or diffusion but also ordered cluster-shearing deposition.
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