采用等离子体增强化学气相沉积技术,以C2H2、H2和N2为反应气体,制备出碳纳米管薄膜.利用扫描电镜(SEM)和拉曼光谱仪对其进行表征,研究刻蚀时间对碳纳米管形貌的影响.结果表明:催化剂刻蚀时间对碳纳米管薄膜的生长起着重要作用,刻蚀时间为10 min时可获得定向性好、密度适中、杂质缺陷少的碳纳米管.
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