纳米复合超硬薄膜的研究现状

无机材料学报, 2004, 19(1): 9-16.

纳米复合超硬薄膜的研究现状

赵红雨 , 范秋林 , 宋力昕 , 施尔畏 , 胡行方

中国科学院上海硅酸盐研究所特种无机材料研究发展中心, 上海 200050

Research and Development Center of Special Inorganic Materials of Shanghai Institute of Ceramics

Shanghai 200050

China

关键词：超硬薄膜 , nanocomposite structure , CVD , magnetron sputtering

Research Status and Development of Superhard Nanocomposite Films

ZHAO Hong-Yu , FAN Qiu-Lin , SONG Li-Xin , SHI Er-Wei , HU Xing-Fang

Keywords： superhard films , 纳米复合结构 , CVD , 磁控溅射

自1994年Veprek等人提出纳米复合超硬薄膜的概念以来,以其优异的力学性能和化学性能而成为当今材料科学领域的研究热点之一.本文将介绍纳米复合超硬薄膜的概念、设计思想、超硬机制、制备技术及工艺、性能和应用前景,及其发展趋势.

Superhard nanocomposite films are attracting more and more interests due to their excellent mechanical and chemical properties since S. Veprek et al. presented the concept in 1994. The concept, classification, superhard mechanisms, synthesis technologies and processes, properties, applications, and development of superhard nanocomposite films were reviewed in this paper.

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