铁电薄膜是具有铁电性且厚度尺寸为数纳米到数微米的薄膜材料,因其在非挥发性铁电随机存储器方面的潜在应用而受到广泛关注.综述了新型无铅、无疲劳Bi4Ti3O12(BIT)基铁电薄膜材料的制备和改性及性能表征方法,阐述了铁电薄膜的3种失效机制及铁电薄膜存储器的研究现状,最后提出了铁电薄膜及存储器今后可能的研究方向.
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