用高能球磨法制备了W-Ti预合金粉末,研究了纳米晶W-Ti粉末的真空烧结致密化和显微组织演化现象以及热处理时组织形貌的变化,并与未球磨粉末的烧结试样进行了比较.结果表明,提高烧结温度有利于提高相对密度;1500℃,2 h为最佳烧结工艺.机械合金化导致粉末内晶粒纳米化,形成成分不均的固溶体W-Ti粉末,使真空烧结后的显微组织结构明显细化,相对密度显著提高;扩散退火后能够形成成分较均匀的W-Ti固溶体.
W-Ti prealloyed powders were prepared by high energy hall milling(MA), and the vacuum sintering densification behavior of the nanocrystal W-Ti prealloyed powders was investigated. The microstructure of the sintered W-Ti alloy before and after heat treatment was examined. The result shows that increase of sintering temperature is beneficial to densification of the sintered W-Ti alloy, and the optimal process is sintering at 1500 ℃ for 2 h with the W-Ti powder milled for 40 h. The nanocrystalline W-Ti powder prepared by MA is favorable for the densification and increases the relative density of the sintered alloy remarkably compared with that of the alloy sintered with as-received powder, W-Ti solid solution with uniform composition forms for the sintered alloy after annealing heat treatment.
参考文献
| [1] | Dirks A G;Wolters R A M;Nellissen A J M .On the microstructure property relationship of W-Ti-(N) diffusion barriers[J].Thin Solid Films,1990,193 -194(01):201-2203. |
| [2] | Daniel R;John C;Shi Jinghong .Tungsten titanium targets for VLSI device fabrication[R].,1994. |
| [3] | Wickeraham C E .Particle contamination during sputter deposition of W-Ti films[J].Journal of Vacuum Science and Technology,1992,8(01):42-444. |
| [4] | Lo C F .Single phase tungsten-titanium sputter targets and method of producing same[P].USA,630155,1996-04-10. |
| [5] | Dunlop J;Rensing Hans .Method for making tungsten-titanium sputtering targets and product[P].USA.200344,2000-05-01. |
| [6] | Wickersham C E .Method of producing tungsten-titanium sputter targets and targets produced thereby[P].USA,685789,1993-08-10. |
| [7] | 莱茵斯C;皮特尔斯M;陈振华.钛与钛合金[M].北京:中国工业出版社,2005 |
| [8] | 林成,刘志林,尹桂丽.非金属元素对工业纯钛相变温度影响的理论研究[J].稀有金属材料与工程,2008(04):571-576. |
| [9] | 张洪涛,丁春华,郭永峰,杨志懋,丁秉钧.机械合金化PM304粉末的烧结特性[J].稀有金属材料与工程,2007(02):335-338. |
| [10] | Brandes E A;Brook G B.Smithens Metals Reference Book[M].Bath:The Bath Press,1992 |
| [11] | 王盘鑫.粉末冶金学[M].北京:冶金工业出版社,1996 |
| [12] | 王世敏.纳米材料制备技术[M].北京:化学工业出版社,2002 |
| [13] | 王赞海,王星明,储茂友,郭奋,赵鑫,沈剑韵.惰性气体热压法制备W/Ti合金靶材研究[J].稀有金属,2006(05):688-691. |
| [14] | 刘德义,陈汝淑,刘宝岩,李忠文,刘世程.钛-钢扩散复合界面组织与结合强度[J].材料热处理学报,2007(z1):239-242. |
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