锂磷氧氮(LiPON,lithium phosphorous oxynitride)薄膜具有较高的离子电导率,极低的电子电导率,很宽的电化学稳定窗口等优点而成为全固态无机薄膜锂电池首选的电解质材料.简要介绍了LiPON薄膜的特性与制备方法,综述了国内外LiPON薄膜为电解质的薄膜锂电池的研究情况,并简要评述了目前薄膜锂电池制备中遇到的困难和今后的研究方向.
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