用能量为1.5MeV,剂量为1.8×1018 e/cm2的电子束辐照直拉硅单晶样品,通过傅里叶变换红外光谱技术(FTIS)研究了辐照后样品中VO2缺陷随退火温度的变化及其热稳定性.实验结果表明,辐照在样品中引入了VO2的亚稳态缺陷,其特征吸收峰在低温红外光谱中向高频方向移动,300℃热处理时该亚稳态缺陷转化为VO缺陷;400℃热处理样品中出现了VO2的稳态缺陷,450℃热处理该稳态缺陷的峰值强度达到最大,当退火温度达到550℃时,该稳态缺陷完全消失并转化为其它复杂的缺陷.这种稳态的VO2缺陷经历450℃长时间热处理表现出良好的热稳定性,而在500℃短时热处理后转化为其它缺陷.
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