采用磁控溅射法在Si(111)和玻璃衬底上制备出不同Mn掺杂含量的Ga2O3薄膜,使用扫描电子显微镜、电子能谱仪、X射线衍射仪、紫外-可见分光光度计等对Mn掺杂Ga2O3薄膜的表面形貌、结晶特性和光吸收性能进行了研究.结果表明,适量掺杂Mn可抑制薄膜的晶格膨胀,促进Ga2O3薄膜晶粒的定向生长,得到尺寸分布较均匀的多面体晶粒.Mn掺杂使Ga2O3价带项向带隙延伸,光学带隙变窄,吸收边红移,近紫外区吸收增强.
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