综述了目前国内外薄膜温度传感器敏感功能膜的制备方法、分类、结构、性质等,着重阐述了金属温度敏感膜的研究现状,并详细介绍了高温薄膜温度敏感器件的研究进展,最后论述了薄膜温度敏感器目前需要解决的一些问题.
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