以硅粉、锗粉为原料,利用高能球磨法,通过改变球磨参数制备硅锗合金。并采用X射线衍射(XRD)、扫描电子显微镜(SEM)、X射线能谱仪(EDS)以及差示扫描量热分析仪(DSC)对实验产物进行表征。结果表明,利用行星式高能球磨仪使配比为Si0.9Ge0.1硅锗粉末达到合金化的最佳球磨参数是:转速为500 r/min,球磨时间为20 h,球料比为20∶1,这一参数能制备出配比为Si0.8Ge0.2的硅锗合金。在该条件下制备出的合金熔点为1388℃。
SiGe alloy was prepared by the method of high-energy ball-milling.The alloying powders which were prepared in different conditions were characterized by X-ray diffraction(XRD),scanning electron microscopy(SEM),with energy dispersive spectrometry(EDS) and differential scanning calorimetry(DSC).The results show that the optimal process parameters for the preparation of Si0.9Ge0.1alloy are ratating speed of 500 r/min,the ratio of ball to powder of 20∶1 with milling time of 20 h,and Si0.8Ge0.2 alloy is also synthesized by high-energy ball milling with these process parameter.The melting point of the SiGe alloy prepared is 1388 ℃.
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