用磁控溅射法在镍基单晶高温合金基体上沉积NiCrAlY涂层 ,研究了真空热处理对涂层组织结构及抗氧化性能的影响.结果表明,溅射NiCrAlY涂层主 要由γ-Ni和β-NiAl两相组成,元素分布均匀;经真空热处理后,涂层主要由γ′-Ni3Al 、β-NiAl相和极少量的α-Al2O3相组成,元素分布变得不均匀,最外层富Al贫Cr.真空 热处理可使溅射NiCrAlY涂层表面较早生成保护性能良好的α-Al2O3.1000℃氧化200 h ,溅射涂层氧化膜有较大部分已经剥落,但真空热处理涂层的氧化膜仍较好地粘附在涂层基 体上.真空热处理使溅射NiCrAlY涂层表面生成的氧化膜粘附性更好,提高了溅射NiCrAlY涂 层的抗氧化性能.
The influence of vacuum heat treatment on NiCrAlY c oating,which was deposited on a Ni-base superalloy substrate by magnetron sputte ring was investigated.It was shown that the sputtered NiCrAlY coating,which cons isted of a two-phase mixture:γ-Ni and β-NiAl phase,had a homogeneous elemental distribution.After vacuum heat treatment,the sputtered NiCrAlY coating mainly c onsisted of γ′-Ni3Al,β-NiAl,and trace of α-Al2O3 phases and the outerm ost layer of the sputtered NiCrAlY coating riched in Al and depleted in Cr.The s puttered NiCrAlY coating after vacuum heat treatment formed α-Al2O3 much ea rlier and the α-Al2O3 scale had a better adherence to the NiCrAlY coating.T herefore vacuum heat treatment improved the oxidation resistance of sputtered Ni CrAlY coating.
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