本文研究了一种以水为溶剂的Ba0．5Sr0.5TiO3（BST）液体源溶液，并用Sol－Gel技术制备出BST薄膜，实验中，对水基BST液体源浓缩凝胶进行了DTA／TGA分析，XRD谱分析显示，BST膜呈现纯钙钛矿相结构．从SEM电镜照片可以看到，BST薄膜厚度均匀一致，650℃热处理20min后，晶粒大小为200nm左右．性能测试结果表明，介电性能与膜厚有关，厚度为1250A的BST薄膜具有较优良的介电性能，当测试频率为1kHz时，介电常数为330，介电损耗为0.043左右．
A new liquid source using water as a solvent was studied to prepare Ba0.5Sr0.5TiO3 (BST) thin films by Sol-Gel
technique. DTA/TGA methods were employed to analyze this water-based BST liquid source gel. XRD results show that the film exhibits a completely
pure perovskite phase. SEM photographs show that the thickness of the films is homogeneous, and the grain size of the thin films annealed at 650℃
for 20min is about 200nm. It is found that the thickness of the film plays an important role in the dielectric properties of the BST films. The BST films
of one layer with the thickness of 1250A have better dielectric properties than those of the multilayers. The dielectric constant and dielectric loss for single
layer BST films are 330 and 0.043 at 1kHz, respectively.
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