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先用二步阳极氧化法制备纳米孔平均孔径约为100 nm的Al/Al2O3(AAO)模板, 再以AAO为模板用溶胶--凝胶法合成管径约为60--80 nm的硅纳米管, 并用扫描电镜和透射电镜观察了硅纳米管的形貌。结果表明, AAO模板的孔径分别随着二步阳极氧化法中电解温度、氧化电压、硫酸和草酸混酸浓度的增大而增大, 硅纳米管的形成与硅烷溶胶的嵌入方法、凝胶形成时间和温度有较大的关系。

The Al/Al2O3 (AAO) template with about 100 nm porous diameter was prepared by secondary anodic oxidation. The effects of concentration of sulphuric-oxalic acid, electrolysis temperature and anodic voltage on porous diameter of AAO template were investigated. The surface morphology of alumina films was characterized by scanning electron micrograph (SEM). Silicon nanotubes with 60–80 nm porous diameter were prepared with AAO template by sol-gel method and the surface morphology was observed by transmission electron microscope (TEM) and SEM. The results show that the porous diameter increases with increasing of concentration of sulphuric-oxalic acid, electrolysis temperature and anodic voltage, respectively. There is important relationship between the formation of silicon nanotubes and the method of embedding of silane sol, drying temperature and the formation time of silane gelatin.

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