采用动力学蒙特卡罗模型模拟了GaAs应变弛豫图形衬底上InAs量子点阵列生长早期阶段,温度对浸润层之上第一层亚单原子层阶段的影响.通过对生长表面形态、岛平均大小、岛大小分布及其标准差等方面的研究,证明了通过控制温度能够得到大小均匀、排列有序的岛阵列,这对后续量子点生长的定位和尺寸控制有重要影响.
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