采用射频磁控溅射技术分别在Si(100)和玻璃衬底上通过调整不同的溅射功率和退火温度成功制备了MoO3薄膜.利用X射线衍射、扫描电镜、紫外可见光分光光度计、接触角测量等进行了表征和分析.X射线衍射表明400℃以上沉积的MoO3结晶薄膜属正交晶系,沿(0k0)(k=2n)取向择优生长,衍射峰强度和薄膜的结晶度随溅射功率的提高逐渐增强；利用扫描电镜观察表面形貌,发现结晶的薄膜表面发生了不同程度的变化,由初期均匀分布的纳米细长状颗粒长大成二维片状结构；紫外可见光分光光度计测试表明,薄膜在可见光区具有良好的光学透过性,平均透过率达60％以上；接触角测量发现薄膜呈明显亲水性,通过后续的表面氟化改性热处理,实现了薄膜亲水-疏水的润湿性能转换.
参考文献
| [1] | Tarsame S. Sian;G. B. Reddy .Stoichiometric amorphous MoO_(3) films: A route to high performance electrochromic devices[J].Journal of Applied Physics,2005(2):026104-1-026104-3-0. |
| [2] | Yao J N;Hashimoto K;Fujishima A .Photochromism induced in an electrolytically pretreated MoO3 thin-film by visible-light[J].Nature,1992,355:624. |
| [3] | Zahid Hussain .Optical and electrochromic properties of heated and annealed MoO_3 thin films[J].Journal of Materials Research,2001(9):2695-2708. |
| [4] | Reddy KR.;Bhaskar T.;Chary KVR. .Structure and reactivity of molybdenum oxide catalysts supported on La2O3-stabilized tetragonal ZrO2[J].Langmuir: The ACS Journal of Surfaces and Colloids,2003(26):10795-10802. |
| [5] | Avendano E;Berggren L;Niklasson GA;Granqvist CG;Azens A .Electrochromic materials and devices: Brief survey and new data on optical absorption in tungsten oxide and nickel oxide films[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2006(1):30-36. |
| [6] | Hussain OM.;Rao KS. .Characterization of activated reactive evaporated MoO3 thin films for gas sensor applications[J].Materials Chemistry and Physics,2003(3):638-646. |
| [7] | He T;Yao JN .Photochromic materials based on tungsten oxide[J].Journal of Materials Chemistry: An Interdisciplinary Journal dealing with Synthesis, Structures, Properties and Applications of Materials, Particulary Those Associated with Advanced Technology,2007(43):4547-4557. |
| [8] | Washizu E.;Yamamoto A.;Abe Y.;Kawamura M.;Sasaki K. .Optical and electrochromic properties of RF reactively sputtered WO3 filMS[J].Solid state ionics,2003(1/4):175-180. |
| [9] | V. Nirupama;K.R. Gunasekhar;B. Sreedhar;S. Uthanna .Effect of oxygen partial pressure on the structural and optical properties of dc reactive magnetron sputtered molybdenum oxide films[J].Current applied physics: the official journal of the Korean Physical Society,2010(1):272-278. |
| [10] | Miyata N.;Ohyama R.;Suzuki T. .PHYSICAL PROPERTIES OF EVAPORATED MOLYBDENUM OXIDE FILMS[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1996(1/2):218-222. |
| [11] | Zhang YZ.;Wang ZC.;Hu XF.;Kuai S. .Preparation and electrochromic properties of Li-doped MoO3 films fabricated by the peroxo sol-gel process[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2000(1):56-59. |
| [12] | Guerrero R M;Garcia J R V;Santes V et al.Preparation of molybdenum oxide thin films by MOCVD[J].Journal of Alloys and Compounds,2007,434:701. |
| [13] | D. Y. Geng;Z. D. Zhang;M. Zhang .Structure and surface characterization of alpha-MoO_3 whiskers synthesized by an oxidation process[J].Scripta materialia,2004(7):983-986. |
| [14] | 沈庆月,陆春华,许仲梓.电致变色材料的变色机理及其研究进展[J].材料导报,2007(z1):284-288,292. |
| [15] | Photoluminescence dependence of ZnO films grown on Si(100) by radio-frequency magnetron sputtering on the growth ambient[J].Applied physics letters,2003(16):2625-2627. |
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