膜/基界面结合强度的测量与评价已成为硬质薄膜技术发展与应用的关键问题.提出了1种新的测量方法———激光冲击检测技术,分析了在脉冲激光作用下,薄膜脱落的机理与数学模型.以测定TiN薄膜界面结合强度为例,用650～1000 mJ的脉冲激光对膜层进行加载,并采用体式显微镜和扫描电镜对薄膜的脱落情况进行表面观察,根据反射信号检测法判别TiN薄膜的失效阈值.实验数据分析表明,测得膜/基界面的结合强度为4.954 GW/cm2,验证了该技术的可行性.
Measurement and evaluation of interfacial adhesion strength is one of the key questions for development and applications of hard film technology.This paper presents a new detection method of pulsed-laser shock technique,based on analyzing the mechanism and mathematical model of film separation under the action of pulsed-laser shock.Taking the measurment of the adhesion strength of TiN film as an example,the surface was impacted by pulsed-laser at the range of 650~1000 mJ,the surface topography of impact points was observed by style microscope and scanning electron microscope,and the TiN film failure threshold was identified by the reflected signal detection.The experimental results suggest that the film/substrate interfacial adhesion strength was 4.954 GW/cm2,which proves that the technique is feasible.
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