采用射频磁控溅射法在聚丙烯己二酯有机薄膜(polypropylene adipate, PPA)衬底上低温制备出锑掺杂的氧化锡(SnO2∶Sb)透明导电膜.研究了薄膜的厚度效应对SnO2∶Sb薄膜的结构、光学和电学特性的影响.制备薄膜为多晶膜,并且保持了纯二氧化锡的金红石结构.载流子浓度和迁移率随着薄膜厚度的增加而增大,电阻率随着薄膜厚度的增加而减小,最低电阻率为 2×10-3Ω*cm.
参考文献
| [1] | Minami T;Takata S;Sato H et al.[J].Journal of Vacuum Science and Technology,1995,A13(03):1095. |
| [2] | 吴广明,王珏,汤学峰,顾牡,陈玲燕,沈军.锡薄膜等温氧化研究[J].物理学报,2000(05):1015-1018. |
| [3] | Mansingh A;Vasant Kumar C V R .[J].THIN SOLID FILMS,1988,167:L11. |
| [4] | Mukherjee A .[J].真空,1989,39(06):537. |
| [5] | Ma J.;Li SY.;Zhao JQ.;Ma HL.;Zhang DH. .Optical and electrical properties of Sn-doped indium oxide films deposited on polyester by reactive evaporation[J].Japanese journal of applied physics,1998(10):5614-5617. |
| [6] | Yang T L;Zhang D H;Ma J et al.[J].Thin Solid Films,1998,326:60. |
| [7] | Zhang DH.;Ma J.;Wang QP.;Gao RW.;Ma HL.;Yang TL. .Preparation of transparent conducting ZnO : Al films on polymer substrates by r. f. magnetron sputtering[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2000(1/2):43-48. |
| [8] | 马瑾,郝晓涛,马洪磊,张德恒,徐现刚.有机衬底SnO2∶Sb透明导电膜的研究[J].半导体学报,2002(06):599-603. |
| [9] | Ma J;Zhang D H;ZHAO J Q et al.[J].Applied Surface Science,1999,151:239. |
| [10] | Cullity B.Elements of X-ray Diffraction[M].London:Addison-Wesley,1959:99. |
| [11] | Shanthi S;Subramanian C;Ramasamy P .[J].Journal of Crystal Growth,1999,197:858. |
| [12] | Suzuki K;Mizuhashi M .[J].Thin Solid Films,1982,97:119. |
| [13] | Hao XT.;Zhang DH.;Yang TL.;Ma HL.;Yang YG.;Cheng CF.;Huang J.;Ma J. .Thickness dependence of structural, optical and electrical properties of ZnO : Al films prepared on flexible substrates[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2001(1/2):137-142. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%