基于有限元方法研究石英晶体谐振器的谐响应振动特性.通过改变AT切石英晶片尺寸,分析不同尺寸情况下石英晶体各轴向的振动位移分布情况,可了解AT切石英晶体谐振器的厚度剪切振荡模态和寄生振动模态分布情况.仿真结果与实际测试结果对比,证明了采用这种仿真方法有助于石英晶体谐振器的设计.
The harmonic response of quartz crystal resonator was discussed based on finite element method.By changing the size of the AT-cut quartz wafer, the vibration displacement distribution for each quartz crystal axial was obtained.The simulation results can be used to analyze the thickness shear vibration mode and the parasitic vibration mode.The comparison between the simulation and the test results showed that the simulation method is helpful to design the quartz crystal resonators.
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