本文通过采用丝网印刷法制备了以)α-Al2O3基片为衬底的纳米和微米级TiO2厚膜,气敏性测试表明,纳米TiO2膜的电阻略高于微米TiO2膜,在实验温度范围内,电阻随氧分压的变化率明显高于微米膜,同时还以XRD,SEM对膜材料的结构和形貌进行了表征.
Nano-TiO2 and micro-TiO2 thick films were prepared on a-Al2O3 substrates by silk netlithograph method, the measured film resistance of nano-TiO2 was higher than that of micro-TiO2 in experimental temperature range, nano-TiO2 film demonstrated more change as the O2 partialpressure changed. XRD and SEM were also used to characterize the stucture of the prepared films.
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