基于直流弧光放电PCVD金刚石薄膜沉积设备的特点,设计开发了基底自动控温系统.将该系统应用于金刚石薄膜的制备中,并采用SEM、Raman光谱等测试方法对所制备的薄膜的形貌、品质进行了表征.结果证明该系统具有较好的稳定性,其应用时所制备的金刚石薄膜的品质明显得到提高,具有广泛的应用前景.
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