利用表面分析技术(AES,XPS,SIMS)研究了经氮离子注入的外科植入材料Ti6Al4V表面成分与键合态,用轮廓仪的测量结果计算了氮离子注入深度及注入氮离子的Ti6Al4V的刻蚀速率。考虑到该合金的基体效应,对AES的定量结果进行了修正。结果表明,注入到合金中的氮离子与合金中的Ti形成高硬度的TiN,N的分布近似为Gauss形式,注入总深度约为350nm,在距表面约140nm处氮量最大,N与Ti的浓度比可达1.1。
The techniques for surface analysis including AES, XPS and SIMS wereemployed to study the chemical composition and bond valence of nitrogen ion im-planted surface of surgical implantation service alloy Ti6A14V. The depth of implant-ed nitrogen ions and the sputtering rate of argon beams were determined using pro-filometer. It was found that the combination of injected nitrogen ions with titaniumresulted in the formation of hard TiN particles and the profile of nitrogen concentra-tion approximately displayed gaussian distribution. The total depth of implantednitrogen is about 350nm and its maximum concentration appers in the depth ofabout 140nm from the surface, in which the concentration ratio of nitrogen to tita-nium may be up to 1.1.
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