分别从溅射法和蒸发法两个方面评述了近年来纳米多层膜制备工艺的最新进展,在此基础上介绍了脉冲激光沉积(PLD)工艺制备纳米超硬多层膜的新方法.对典型的超硬膜TiN、(Ti,Zr)N、(Ti,Al)N、TiN/SiO2、B1-SiC、TiN/SiN4进行了简单回顾,并对其硬度、残余应力、摩擦磨损和抗氧化性能等方面做了详细的比较.最后,简述了纳米超硬多层膜表征的一般手段,并展望了发展前景.
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