本文采用磁控溅射方法在硅基底上沉积一层金属钛膜,用于取代传统阳极氧化法制备TiO2纳米管阵列所用的金属钛片.分别在乙二醇和丙三醇两种电解液中进行阳极氧化,均在硅基底上形成了高度有序的TiO2纳米管阵列.该方法与硅工艺集成技术兼容,有利于基于TiO2纳米管阵列的微纳米器件的设计和制造.
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