利用直流磁控溅射法在室温水冷玻璃衬底上制备出了高质量的钛镓共掺杂氧化锌(TGZO)透明导电薄膜.研究了溅射功率对TGZO薄膜结构、形貌和光电性能的影响.研究结果表明:溅射功率对TGZO薄膜的结构和电阻率有重要影响.X射线衍射分析表明,TGZO 薄膜为六角纤锌矿结构的多晶薄膜,且具有c轴择优取向.在溅射功率为120 W时,实验获得的TGZO薄膜的方块电阻为2.71 Ω/□,此时电阻率具有最小值2.18×10-4 Ω·cm.实验制备的TGZO 薄膜在可见光区范围内平均透过率达到了90%以上.
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