采用脉冲激光沉积(PLD)方法制备了LiCoO2薄膜,并研究了沉积条件对PLD生长的LiCoO2薄膜结构和形貌的影响.结果表明,适当减少激光功率可以有效降低LiCoO2薄膜表面粗糙度;采用在400℃原位退火可以得到层状结构的LiCoO2薄膜,而在一定范围内提高原位退火温度和升高氧气偏压可以提高层状结构的LiCoO2薄膜的结晶度.本实验中最优工艺制备的LiCoO2薄膜具有较好电化学可逆性,首次放电容量为36μAh/(μm·cm2),循环效率为94.44%.
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