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运用有限元分析软件Comsol Multiphys-ics,结合晶体生长固液界面曲率分析法,模拟了垂直布里奇曼法生长Cd0.9Zn0.1Te(CZT)晶体。研究了固液界面处曲率变化对于溶质径向偏析的影响,揭示了界面曲率与溶质偏析的内在关联性,并计算了数值。分析了3种晶体生长方式:(1)坩埚匀速生长;(2)两阶段坩埚变速生长;(3)坩埚回熔生长分别对于溶质偏析的影响。采用扫描电子显微镜SEM中的能谱仪EDX测量3种工艺的Zn组分分布:(1)模拟值比对实验结果发现可以运用固液界面的曲率平均值来推算溶质径向组分偏差的大小;(2)模拟推算的溶质径向偏差值更加接近于实验所得的溶质组分偏差最大值;(3)坩埚回熔生长法生长晶体的固液界面的波动性小,界面稳定性最好,溶质径向组分偏差也最小。

The Cd0.9Zn0.1Te crystal growth(LPVB,low pressure vertical bridgman) was numerically simulated and analyzed by the simulation software of comsol Mutiphysics.The influence of curvature on solid-liquid interface is studied,and the radial solute segregation is calculated.Three kinds of growth methods divided as following:(1) constant velocity;(2) changed velocity,(3) remelting growth are studied on the radial solute segregation.Energy dispersive X-ray detector of scanning electronic microscopy is used to test the concentration of zinc.And all the calculated data are agreements with the results of the experiments.

参考文献

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[6] 刘俊成,谷智,介万奇.垂直布里奇曼法CdZnTe晶体生长过程的数值分析[J].材料研究学报,2003(06):649-658.
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