AFM Studies of Platinum Silicide Thin Films on Silicon Grown by Pulsed Laser Deposition

材料科学技术（英文）, 2002, 18(1): 24-26.

^1, , ^2, , ^3, , ^4, , ^5,

1.School of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001, China

2.School of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001, China

3.School of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001, China

4.STM Lab, Institute of Chemistry, Chinese Acadcmy of Sciences, Beijing 100080, China

5.Laboratory of Laser Molecular Beam Epitaxy, Lanzhou Institute of Physics, Chinese Acadcmy of Sciences, Lanzhou 730000,China

基金项目: The authors would like to thank Jianping Yang and Zhanxu Lei for support in the PLD investigations and Shangkui Qi Foundation of Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences

AFM Studies of Platinum Silicide Thin Films on Silicon Grown by Pulsed Laser Deposition

Keywords： PtSi

PtSi ultra-thin films were grown on Si-wafer using pulsed laser deposition (PLD). The surface structure of thesefilms was studied by atomic force microscopy (AFM). In addition, the compositional structure of the PtSi as deter-mined from X-ray photoelectron spectroscopy (XPS) is discussed. First report of a possible growth mechanism ispresented, on studying the variation of morphological features (i.e., roughness and size of crystallites) with annealingtemperatures and the film thicknesses.

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AFM Studies of Platinum Silicide Thin Films on Silicon Grown by Pulsed Laser Deposition

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